| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an actuator operated by fluid pressure, whose mechanism itself is simple, and which can be used in many high-accuracy positioning devices. SOLUTION: An actuator 1 is equipped with a main body 2 through which a channel 2C is passed, an inertia body 4 which is slid while being guided by the main body 2, a nut 6 arranged on the main body 2, a spring 5 intervened between the inertial body 4 and the nut 6, and a mounting member 3 fixed to the main body 2. Compressed air is momentarily supplied through the channel 2C of the main body 2 to a space 7 formed in a manner that the inertial body 4 is energized against the mounting member 3 by the spring 5, thereby a moving body fixed on the mounting member 3 can be moved minutely having the high accuracy of a micron order.</p> |
