SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device which can precisely detect temperature, can heat a wafer more speedily and can keep the heated wafer at a constant temperature. SOLUTION: Lamps 22 are provided on an upper stage of a chamber 21. A wafer is transported into the chamber 21 and once received by a temperature detector 24 placed near the lamps 2. The wafer is heated there. When the temperature of the wafer reaches a predetermined temperature, the temperature detector 24 is lowered and the wafer is put on a supporting plate 23 provided with a heater for keeping temperature. Film forming operations are performed with keeping the wafer at a constant temperature.