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发明名称
APPARATUS FOR DRY ETCHING
摘要
申请公布号
KR0139258(B1)
申请公布日期
1998.06.01
申请号
KR19940021497
申请日期
1994.08.30
申请人
NIPPON DENKI CORP.
发明人
MIYOSHI, GOUSKE
分类号
C23F4/00;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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