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发明名称
SEMICONDUCTOR DEVICE HAVING AN AREA FOR ISOLATING ELEMENTS AND ITS FABRICATION METHOD
摘要
申请公布号
KR0137430(B1)
申请公布日期
1998.06.01
申请号
KR19940015529
申请日期
1994.06.30
申请人
HITACHI LTD
发明人
MIURA, HIDEO;OGASAWARA, MAKOTO;MASUDA, HIROO;MURATA, JUN;OKAMOTO, NORIAKI
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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Isolation process
