PATTERN ALIGNING DEVICE FOR EXPOSURE,申请号KR19950017240U-传众专利搜索

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发明名称	PATTERN ALIGNING DEVICE FOR EXPOSURE
摘要
申请公布号	KR0119786(Y1)	申请公布日期	1998.06.01
申请号	KR19950017240U	申请日期	1995.07.13
申请人	LG SEMICONDUCTOR CO.,LTD	发明人	YU, YOUNG-SOO
分类号	G03F7/207;G03F9/00;H01L21/027;(IPC1-7):G03F7/207	主分类号	G03F7/207
代理机构		代理人
主权项
地址

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