APPARATUS FOR MEASURING THICKNESS AND METHOD THEREFOR

摘要

An apparatus for measuring thickness and a method therefor are disclosed, in which the precision is improved, the measuring time is shortened, the reliability is upgraded, and the flatness of thickness also can be precisely measured. The apparatus for measuring thickness according to the present invention includes a test piece retaining part (100) for retaining a test piece and for moving it along X, Y and Z axes. The apparatus further includes a sensing part (200) having a sensor retaining part (40) for retaining an upper sensor (41), and having a test piece retaining part supporting table (50) for supporting the test piece retaining part (100) and having a lower sensor (42) fixed thereon. The test piece retaining part (100) includes; an X axis carrying part (10) capable of moving in the direction of X axis, a Y axis carrying part (20) capable of moving in the direction of Y axis, and a Z axis carrying part (30) capable of moving in the direction of Z axis.