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发明名称
ELEKTROSTATISCHE KLEMMVORRICHTUNG ZUR HALTERUNG EINER WAFER
摘要
申请公布号
DE69316872(T2)
申请公布日期
1998.05.28
申请号
DE19936016872T
申请日期
1993.11.01
申请人
VARIAN ASSOCIATES, INC., PALO ALTO, CALIF., US
发明人
FRUTIGER, A., WILLIAM, BEVERLY, MA 01915, US
分类号
B23Q3/15;H01L21/265;H01L21/683;H02N13/00;(IPC1-7):H02N13/00;H01L21/00
主分类号
B23Q3/15
代理机构
代理人
主权项
地址
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