申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
SHUDO, SHIGEKI, ANNAKA-SHI, GUNMA-KEN, JP;FUJIKI, HIRONAO, TAKASAKI-SHI, GUNMA-KEN, JP;MATSUDA, AKIRA, ANNAKA-SHI, GUNMA-KEN, JP;SHIMAMOTO, NOBORU, ANNAKA-SHI, GUNMA-KEN, JP;YAMAMOTO, YASUSHI, TAKASAKI-SHI, GUNMA-KEN, JP;KUCHIKI, EIJI, KAWAGOE-SHI, SAITAMA-KEN, JP;FUJITA, YUJI, TOKOROZAWA-SHI, SAITAMA-KEN, JP |