| 摘要 |
<p>A pellicle which exhibits an excellent retaining performance of immobilizing extraneous matter such as dust floating in the space enclosed with the pellicle and a mask, and which has on the inner side of a pellicle frame an adhesive layer having a resistance to short wavelength light, such as excimer light. This pellicle has a pellicle frame, a pellicle film formed on one side of the pellicle frame, and an adhesive layer formed on the inner side of the pellicle frame and containing a greaselike fluorocarbon resin.</p> |
