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发明名称
Texturierter Fokussierring und dessen Verwendung in einer Plasmabearbeitungsvorrichtung
摘要
申请公布号
DE69500898(T2)
申请公布日期
1998.05.28
申请号
DE1995600898T
申请日期
1995.03.03
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
KAVA, JOSEPH, SAN JOSE, CALIFORNIA 95118, US;MCGOVERN, RICHARD J., SAN JOSE, CALIFORNIA 95124, US;BLACKBURN, GREG A., SAN JOSE, CALIFORNIA 95120, US
分类号
H01L21/302;H01J37/32;H01L21/3065;H01L21/31;H01L21/683;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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