发明名称 Process for joining solid bodies e.g. for microelectronic components
摘要 Process for joining two solid bodies comprises using a joining material in the form of an intermediate layer or layers, the thickness of a molecule layer of the material having a total thickness of approximately 20 molecule layers. Total thickness is below 50 nm. Also claimed is a process for separating the solid bodies.
申请公布号 DE19752412(A1) 申请公布日期 1998.05.28
申请号 DE1997152412 申请日期 1997.11.26
申请人 MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V., 80539 MUENCHEN, DE 发明人 GOESELE, ULRICH, PROF. DR., 06114 HALLE, DE;KRAEUTER, GERTRUD, DR., 06110 HALLE, DE;WEGNER, GERHARD, PROF. DR., 55127 MAINZ, DE;RUEHE, JUERGEN, DR., 55128 MAINZ, DE
分类号 B05D1/20;H01L21/58 主分类号 B05D1/20
代理机构 代理人
主权项
地址