发明名称 METHOD FOR DEPOSITING ELECTROCONDUCTIVE TRANSPARENT COATING
摘要 FIELD: production of transparent electrodes and electrical heating elements. SUBSTANCE: indium metal with addition of tin is subjected to reactive magnetron sputtering, followed by deposition in atmosphere created by mixture of inert gas and oxygen. Simultaneously, deposition process is subjected to ionic stimulation. Coatings may be applied onto surfaces without pre-heating and it reduces time for coating application. EFFECT: higher efficiency.
申请公布号 RU2112076(C1) 申请公布日期 1998.05.27
申请号 RU19970108544 申请日期 1997.05.22
申请人 TOVARISHCHESTVO S OGRANICHENNOJ OTVETSTVENNOST'JU;TIKO 发明人 TITOMIR A.K.;SUSHKOV V.JA.;DUKHOPEL'NIKOV D.V.;TITOMIR A.K.;SUSHKOV V.JA.;DUKHOPEL'NIKOV D.V.
分类号 C23C14/35;C23C14/08;(IPC1-7):C23C14/35 主分类号 C23C14/35
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