发明名称 |
METHOD FOR DEPOSITING ELECTROCONDUCTIVE TRANSPARENT COATING |
摘要 |
FIELD: production of transparent electrodes and electrical heating elements. SUBSTANCE: indium metal with addition of tin is subjected to reactive magnetron sputtering, followed by deposition in atmosphere created by mixture of inert gas and oxygen. Simultaneously, deposition process is subjected to ionic stimulation. Coatings may be applied onto surfaces without pre-heating and it reduces time for coating application. EFFECT: higher efficiency.
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申请公布号 |
RU2112076(C1) |
申请公布日期 |
1998.05.27 |
申请号 |
RU19970108544 |
申请日期 |
1997.05.22 |
申请人 |
TOVARISHCHESTVO S OGRANICHENNOJ OTVETSTVENNOST'JU;TIKO |
发明人 |
TITOMIR A.K.;SUSHKOV V.JA.;DUKHOPEL'NIKOV D.V.;TITOMIR A.K.;SUSHKOV V.JA.;DUKHOPEL'NIKOV D.V. |
分类号 |
C23C14/35;C23C14/08;(IPC1-7):C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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地址 |
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