| 摘要 |
The micro refrigerator comprises two NIS, i.e. normal metal/insulator/superconductor tunnel junction refrigerators (2, 2') formed on a substrate (1) connected in series in a SINIS structure, i.e. with a common normal metal element (4, 4') connected between and the superconducting elements (3, 3') outside. The refrigerator includes an insulating membrane (6) thermally isolated from the substrate (1) and the common normal metal element (4, 4') includes a protrusion (5) extending to this insulating membrane (6), which refrigerates the insulating membrane (6) and thus the aforesaid object (X). <IMAGE> |
