Temperature sensor element and temperature sensor including the same

摘要

The present invention provides a temperature sensor element having excellent heat resistance, quick heat response, stable resistance, and high reliability with less variation in resistance against time. The temperature sensor element includes a thermo-sensitive film mainly composed of a heat sensitive material having electrical resistance varies depending on the temperature; a pair of electrode films arranged to measure the electrical resistance in the direction of the thickness of the thermo-sensitive film, a base plate mainly composed of a heat-resistant insulating material for supporting the thermo-sensitive film and the electrode films, an anti-diffusion film interposed between the thermo-sensitive film and the electrode film in the vicinity of the base plate, and a film mainly composed of a heat-resistant insulating material for covering the thermo-sensitive film and the electrode films except the lead-connecting terminals of the electrode films. The thermo-sensitive film is composed of an oxide of corundum crystalline structure represented by the formula of (Al1-x-yCrxFey)2O3, where 0.05≤x+y≤0.95, and 0≤y/(x+y)≤0.6, and the anti-diffusion film is composed of an oxide of corundum crystalline structure represented by the formula of (Al1-x-yCrxFey)2O3, where 0≤x+y≤0.95. <IMAGE>