发明名称 Semiconductor mounting substrate having micronized wire and method of manufacturing the same
摘要 Without using a photolithography technique, a semiconductor mounting substrate having micronized wirings can be obtained by simple manufacturing steps in a short time. Flaws 2 are formed in a substrate 1, and metalized layers 3 by en electroless plating are formed thereon, whereby micronized wirings are formed. Moreover, the flaws 2 are formed also by laser or a diamond indentation tool to which ultrasonic wave is applied. <IMAGE>
申请公布号 EP0814504(A3) 申请公布日期 1998.05.27
申请号 EP19970108814 申请日期 1997.06.02
申请人 NEC CORPORATION 发明人 SHIBUYA, AKINOBU;KIMURA, MITSURU
分类号 H05K3/00;C23C18/16;C23C18/18;H01L21/48;H05K3/18;H05K3/46 主分类号 H05K3/00
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