JIG FOR FIRING OF ELECTRONIC PARTS

摘要

PROBLEM TO BE SOLVED: To obtain a jig causing no reaction at the time of firing Cab-contg. ceramic electronic parts and capable of maintaining characteristics by coating the surface of a corundum-mullite substrate with zirconia contg. enough CaO to stabilize the zirconia by thermal spraying. SOLUTION: The surface of a corundum-mullite substrate having >=72% Al2 O3 content is coated with zirconia contg. 10-33wt.% CaO to produce the objective jig for firing of electronic parts. When a zirconia coating layer is formed by the conventional ceramic thermal spraying method, superior durability is ensured. Plasma spraying is preferably adopted in consideration of the m.p. of zirconia as a material to be sprayed and water plasma spraying is especially preferably adopted from the viewpoint of work efficiency. The thickness of the coating layer is desirably >=0.05mm. Since the resultant jig reacts very hardly with parts to be fired, electronic parts having satisfactory electrical characteristics are obtd.