| 摘要 |
PROBLEM TO BE SOLVED: To produce an aluminum nitride solid of improved thermal conductivity which is obtained by nitriding an alumina material. SOLUTION: This aluminum nitride solid of high thermal conductivity is produced by heating a solid composed of a mixture of a γ-Al2 O3 -based compound, and a compound of a metal of IIa or IIIa group in the periodic table in an oxide-converted quantity of 1-30wt.% based on the A12 O3 -converted weight of the Y-Al2 O3 based compound, at approximately 600-1,000 deg.C in the oxygencontaining gaseous atmosphere, and further heating the mixture at 1,400-1,700 deg.C in an atmosphere of gaseous mixture of ammonia and hydrocarbons. The γ-Al2 O3 -based compound is preferably a solution that contains a γ-Al2 O3 -based compound forming precursor, and the compound of a metal of Ila or IIIa group is preferably a chloride, carbonate, nitride or alkoxide of calcium, strontium, barium, yttrium, lanthanum or cerium. |
