MICROCRYSTALLINE FILM AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To obtain a microcrystalline film suitable for thin-film solar cells, capable of improving crystallinity and increasing film-making speed by specifying a crystal grain size distribution of the microcrystalline film in which a number of crystal grains are present in the amorphous phase. SOLUTION: This microcrystalline film contains a number of crystal grains in the amorphous phase deposited on a substrate, where the average crystal grain size is larger on the side of the substrate than on the opposite side. The microcrystalline film is deposited by decomposing a stock gas flowing into a reaction chamber into a plasma with electrons accelerated by an electron beam gun, where the stock gas is supplied into the reaction chamber at an increasing gas rate, either stepwise in 2 stages or continuously, to be deposited on the substrate to form a film thereon.