发明名称 |
Composition and method for polishing a composite comprising titanium |
摘要 |
An aqueous slurry is provided which is useful for the chemical-mechanical polishing of substrates containing titanium comprising: water, submicron abrasive particles, an oxidizing agent, and a combination of complexing agents comprising a phthalate compound and a compound which is a di- or tri-carboxylic acid with at least one hydroxyl group in an alpha position relative to one of the carboxyl groups.
|
申请公布号 |
US5756398(A) |
申请公布日期 |
1998.05.26 |
申请号 |
US19970819236 |
申请日期 |
1997.03.17 |
申请人 |
RODEL, INC. |
发明人 |
WANG, JIUN-FANG;SETHURAMAN, ANANTHA R.;COOK, LEE MELBOURNE |
分类号 |
C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/321;(IPC1-7):B24D3/34 |
主分类号 |
C09G1/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|