PIEZOELECTRIC THIN FILM, ITS PRODUCTION AND INK JET RECORDING HEAD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide the piezoelectric thin film whose piezoelectric strain constant value is not reduced even at the time of increasing the thickness of the thin film and also to provide the production of the thin film. SOLUTION: This piezoelectric thin film 21 consists of a base layer(s) 14 formed from a three-component system piezoelectric material and a member layer(s) 13 formed from a two-component system piezoelectric material having a lower crystallization temp. than that of the base layer's) 14. Therefore, the crystal properties of the piezoelectric thin film 21 as a whole at the time of increasing the film thickness, are improved and the reduction in piezoelectric constant value of the thin film 21 having an increased thickness is inhibited from occurring. Further, the piezoelectric film 21 having an increased thickness is produced by many times forming coating layers of the above piezoelectric materials with a sol-gel method and annealing/crystallizing these piezoelectric material coating layers all together.