| 摘要 |
PROBLEM TO BE SOLVED: To rotate a cassette support base by 90 degrees in a perpendicular surface by utilizing a driving force of vertical direction without producing any particles. SOLUTION: A cassette carrying-in and out mechanism includes a cassette support base 44 having a bottom surface support part 52 for receiving the bottom surface of a cassette and a backside support part 54 for receiving its backside, a vertically moved base seat 34 vertically moved while the cassette support base 44 is supported to be freely rotated in vertical direction and a rotating mechanism 58 for rotating the cassette support base 44 by about 90 degrees according to the vertical movement of the base seat 34, and the cassette support base 44 is constructed to be rotated in a perpendicular surface directly crossing a treated body carrying-out port for carrying treated bodies. The cassette support base 44 having the cassette is rotated by 90 degrees within the perpendicular surface. This cassette is transferred by a cassette carrying arm part provided on the front side of a cassette chamber 18 while the cassette is rotated by a specified angle within a horizontal surface between itself and a cassette board base. |
