摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device and a method for removing a transparent thin film capable of easily removing the prescribed part of the thin film by the laser beam, and efficiently removing upper layers (a first insulation layer, a light emission layer, and a second insulation layer) from a transparent electrode part with excellent precision, and a thin film electroluminescent element. SOLUTION: In a transparent thin film removing device to remove a second thin film layer of a transparent thin film having a first thin film layer (a transparent electrode 3) and a second thin film layer (a first insulation layer 4, a light emission layer 5, and a second insulation layer 6) laminated on an upper layer of the first thin film layer, a laser beam irradiating means to irradiate the laser beam 34 which can be absorbed by the first thin film layer 3 and transparent for the second thin film layers 4, 5, 6 from the second thin film layer side is provided, and the upper layers 4, 5, 6 are removed from the first thin film layer 3 through abrasion by the energy of the laser beam 34 absorbed by the first thin film layer 3.</p> |