发明名称 DEVICE AND METHOD FOR REMOVING TRANSPARENT THIN FILM, AND THIN FILM ELECTROLUMINESCENT ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a device and a method for removing a transparent thin film capable of easily removing the prescribed part of the thin film by the laser beam, and efficiently removing upper layers (a first insulation layer, a light emission layer, and a second insulation layer) from a transparent electrode part with excellent precision, and a thin film electroluminescent element. SOLUTION: In a transparent thin film removing device to remove a second thin film layer of a transparent thin film having a first thin film layer (a transparent electrode 3) and a second thin film layer (a first insulation layer 4, a light emission layer 5, and a second insulation layer 6) laminated on an upper layer of the first thin film layer, a laser beam irradiating means to irradiate the laser beam 34 which can be absorbed by the first thin film layer 3 and transparent for the second thin film layers 4, 5, 6 from the second thin film layer side is provided, and the upper layers 4, 5, 6 are removed from the first thin film layer 3 through abrasion by the energy of the laser beam 34 absorbed by the first thin film layer 3.</p>
申请公布号 JPH10137953(A) 申请公布日期 1998.05.26
申请号 JP19960311258 申请日期 1996.11.08
申请人 SHARP CORP;SUMITOMO HEAVY IND LTD 发明人 NAKAMURA NORIAKI;HAYASHI KENICHI
分类号 H05B33/10;B23K26/00;B23K101/40;(IPC1-7):B23K26/00 主分类号 H05B33/10
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