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发明名称
PRODUCTION OF IRON NITRIDE THIN CONTAINING FILM
摘要
申请公布号
JPH10140326(A)
申请公布日期
1998.05.26
申请号
JP19960311404
申请日期
1996.11.07
申请人
TOKYO DENSHI YAKIN KENKYUSHO:KK
发明人
MASAKI SUSUMU;FUKUI SHIGEO;ICHINOHE TAKAHISA;KOBAYASHI HIROSHI;MORIZAKI HIROSHI
分类号
C23C14/06;C23C14/22;(IPC1-7):C23C14/06
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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