,申请号JP19920203842-传众专利搜索

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发明名称
摘要
申请公布号	JP2755876(B2)	申请公布日期	1998.05.25
申请号	JP19920203842	申请日期	1992.07.30
申请人	TOSHIBA KK	发明人	NUNOTANI NOBUHITO;TAKAHASHI KOICHI;MYASHITA NAOTO
分类号	H01L21/205;C23C16/46;C30B25/08;H01L21/00;H01L21/31;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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