| 摘要 |
PROBLEM TO BE SOLVED: To prevent a substrate from being contaminated by contact with a hand or dust. SOLUTION: A not-shown substrate is placed on a support plate 11 protruded from a drive box 10a and the outer peripheral edge thereof is held by holding members 14 and 15. The holding members 14 and 15 are opened/closed in the diametral direction of the substrate by reverse-driving cantilever supports 12 and 13 for cantilever-supporting the holding members. Since the cantilever supports 12 and 13 are prevented from contacting with each other or with the support plate 11 to be opened/closed, dust generation in the movable part of a hand is prevented. |
