| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device with superior sensitivity in detecting defects which inspects the plating of a lead frame for its appearance defects. SOLUTION: This device comprises a transferring means 140 for samples to transfer samples at a constant speed in one direction, a linear area photographing means 110 to photograph the linear area of a sample surface in a predetermined location orthogonal to the direction of the transfer of samples, a linear illuminating means 130 to illuminate the linear area of the sample surface diagonally at such an angle that the specular reflection light of illumination does not directly enter the linear area photographing means 110. and image processing means 150 to extract the defect part of the sample through the use of the photographed image signal data obtained by photographing the linear area of the sample by the linear area photographing means 110. The image processing means 150 performs comparison processing for comparing the image signal of a sample at every location corresponding to each pixel of the linear area photographing means 110, on the basis of the photographed image signal data obtained by the linear area photographing means 110 with a predetermined set slice level, detects the sections of signals where the level of image signal at every location is out of a predetermined range, and judges the detected sections only within a range set in advance as defect parts. |
