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发明名称
PROBE EQUIPMENT
摘要
申请公布号
JPH10135159(A)
申请公布日期
1998.05.22
申请号
JP19960286761
申请日期
1996.10.29
申请人
SEIKO INSTR INC
发明人
YASUTAKE MASATOSHI
分类号
H01L21/302;H01L21/027;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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地址
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