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发明名称
CONTACT FORMING METHOD AND MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10135324(A)
申请公布日期
1998.05.22
申请号
JP19960292481
申请日期
1996.11.05
申请人
SONY CORP
发明人
NAKANISHI YOSHIMASA
分类号
H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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