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发明名称
OPTICAL DISPLACEMENT DETECTING DEVICE
摘要
申请公布号
JPH10132612(A)
申请公布日期
1998.05.22
申请号
JP19960285541
申请日期
1996.10.28
申请人
MITSUTOYO CORP
发明人
KOMI TOSHIHIRO
分类号
G01D5/36;G01D5/347;(IPC1-7):G01D5/36
主分类号
G01D5/36
代理机构
代理人
主权项
地址
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