| 摘要 |
Stripe or spot patterns of impurities or dopants on a very fine scale are produced in solid surfaces by high energy ion bombardment through at least one thin screening crystal. The ions are channeled through the screening crystal and interact with the next crystal to produce a moire pattern of the bombarding ions at the surface of a substrate. The substrate can be the second crystal or a third solid body intercepting the beam emerging from a thin second crystal.
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