| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater having excellent temperature accuracy, which achieves a set temperature in a short time and which does not exceeds the set temperature, by embedding a heating resistor having a specified resistance value in an AlN. SOLUTION: In a ceramic heater, which is formed by embedding a heating resistor in an AlN, resistance value of the heating resistor is set at (E<2> /W).0.003-(E<2> /W).0.135Ω(E means input voltage V, and W means weight (g) of the AlN forming a ceramic heater). Temperature of the ceramic heater is thereby raised by about 100C in a short time such as ten seconds or less, and the efficiency can be remarkably improved. Rush current immediately after the electrifying is limited so as to restrict the sudden heating, and accurate temperature control is enabled. As a material for the heating resistor, tungsten or molybdenum having a high melting point and a small percentage of contraction is desirable.
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