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发明名称
METHOD OF COOLING HEATER IN HEAT-TREATING APPARATUS
摘要
申请公布号
JPH10135232(A)
申请公布日期
1998.05.22
申请号
JP19960289819
申请日期
1996.10.31
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YOKAWA TAKASHI
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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