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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH10135322(A)
申请公布日期
1998.05.22
申请号
JP19960288238
申请日期
1996.10.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUTSUMI TOSHIAKI
分类号
H01L21/283;H01L21/762;H01L29/78;(IPC1-7):H01L21/762
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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