RESIN COATER AND RESIN FEED NOZZLE,申请号JP19960285102-传众专利搜索

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发明名称	RESIN COATER AND RESIN FEED NOZZLE
摘要
申请公布号	JPH10135253(A)	申请公布日期	1998.05.22
申请号	JP19960285102	申请日期	1996.10.28
申请人	NEC KANSAI LTD	发明人	SUZUKI RIE
分类号	B05B1/00;H01L21/56;H01L21/60;(IPC1-7):H01L21/56	主分类号	B05B1/00
代理机构		代理人
主权项
地址

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