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发明名称
PERFORMANCE ESTIMATING DEVICE OF INTEGRATED CIRCUIT AND ITS METHOD
摘要
申请公布号
JPH10134093(A)
申请公布日期
1998.05.22
申请号
JP19960285221
申请日期
1996.10.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
IWASAKI TOMOE;MURAOKA MICHIAKI;KAWAGUCHI KENICHI;KAWAKAMI YOSHIYUKI;OKAZAKI KAORU;HATTORI MASARU
分类号
H01L21/82;G06F17/50;(IPC1-7):G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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