PHOTOSENSITIVE COMPOSITION

摘要

PROBLEM TO BE SOLVED: To obtain a photosensitive composition having high sensitivity and excellent preservable stability with age by incorporating a specific triaryl sulfonium sulfonate. SOLUTION: The triaryl sulfonium sulfonate obtained by the reaction of a triary sulfonium halogenide with a ammonium sulfonate and generating an acid by the irradiation with active ray or radiation is incorporated. As an ammonium cation of the ammonium sulfonate to be used, a tetraalkyl ammonium cation such as tetramethyl ammonium cation or tetraethyl ammonium cation, a trialkyl ammonium cation such as trimethyl ammonium cation or triethyl ammonium cation and a dialkyl ammonium cation such as dimethyl ammonium cation or diethyl ammonium cation are mentioned.