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发明名称
LOW TEMPERATURE SCANNING TYPE PROBE MICROSCOPE
摘要
申请公布号
JPH10132833(A)
申请公布日期
1998.05.22
申请号
JP19960288350
申请日期
1996.10.30
申请人
OLYMPUS OPTICAL CO LTD
发明人
HAYASHI YOSHIAKI
分类号
G01B21/30;G01N37/00;G01Q20/02;G01Q30/02;G01Q30/08;G01Q30/10;G01Q30/20;G01Q60/24;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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