PROBE DEVICE OF FINE PROCESSING APPARATUS,申请号JP19960285564-传众专利搜索

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发明名称	PROBE DEVICE OF FINE PROCESSING APPARATUS
摘要
申请公布号	JPH10134758(A)	申请公布日期	1998.05.22
申请号	JP19960285564	申请日期	1996.10.28
申请人	SEIKO INSTR INC	发明人	YASUTAKE MASATOSHI
分类号	G01B21/30;G01Q30/02;G01Q70/06;G01Q80/00;H01J37/073;H01J37/30;H01L21/027;H01L21/302;(IPC1-7):H01J37/30	主分类号	G01B21/30
代理机构		代理人
主权项
地址

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