发明名称 METHOD AND DEVICE FOR EXTRACTING ABNORMALITY OF PROCESS WORKING PROCESS
摘要 <p>PROBLEM TO BE SOLVED: To quickly extract the abnormality of a process working process so that the abnormality can be put into practical use by analyzing the causal relation between the information on the resulting quality of a product and the information, which affects the quality of the product by means of a multistage multivariate analyzing means. SOLUTION: The information on the results quality of a product, information which gives an influence on the quality of the product, and information on analyzed results are stored in a storage device 2. In a central processing unit 3 which extracts abnormality, a multistage multivariate analyzing means 4 which makes the abnormality extraction performs analysis, based on the information stored in the storage device 2. A displaying and printing device 5 displays or prints the extracted results, etc. The analyzing means 4 is provided with a data retrieving section A, which retrieves necessary information from the storage device 2, an analysis data generating section B which generates analysis data from the retrieved data, an automatic extraction processing section C, which extracts the abnormality, a central control section D which controls the processing of the sections A, B, and C, and a working data storing sections E which stores, delivers, and receives the working data of each processing.</p>
申请公布号 JPH10135091(A) 申请公布日期 1998.05.22
申请号 JP19960290727 申请日期 1996.10.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TANAKA MASAYUKI;OGAWA KATSUYUKI
分类号 H01L21/02;G05B15/00;H01L21/3065;H01L21/66;(IPC1-7):H01L21/02 主分类号 H01L21/02
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