| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle housing vessel which may be produced by a single metal mold and may be reduced in its production cost. SOLUTION: This vessel R is constituted by stacking plural trays 20A, 20B of the same shape molded by injection molding. These trays 20A, 20B have placing parts 21 on which a pellicle frame 11 may be placed, retaining parts 22 which continue to the outer peripheral edges of these placing parts 21 and incline to a taper shape toward the rear surface side, plural positioning projections 24 which are projectingly formed on the surfaces of these retaining parts 22 apart spaced intervals and fitting parts 23 which continue to the outer peripheral edges of the retaining parts 22 and are formed with respectively steps 32a, 32b of a reverse shape on the front and rear sides. The upper tray 20B is put on the lower tray 20A in such a manner that the steps 32a, 32b fit to each other. The pellicle frame 11 placed on the placing part 21 of the lower tray 20A is retained and held by the retaining part 22 of the upper tray 20B. |
