| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric controller which can maintain certain displacement at low cost, regardless of the piezoelectric property change, in a piezoelectric controller which receives a certain displacement by driving the piezoelectric with regular frequency. SOLUTION: An inexpensive displacement sensor can be utilized, and furthermore the displacement at drive with regular frequency can be kept constant from the piezoelectric displacement in DC voltage, even if the piezoelectric property changes, by deciding the piezoelectric drive voltage value at the time of driving it with regular frequency from the piezoelectric displacement in DC voltage outputted from the driver 2 of a piezoelectric element 1, before driving the piezoelectric element 1 with regular frequency as an actuator. |
