| 摘要 |
PROBLEM TO BE SOLVED: To improve the detecting precision and sensitivity by integrally sticking a support part and a mask plate on both sides in the thickness direction of a flexible vibrating piezoelectric oscillator with a prescribed space, and providing a through-hole in the position of the mask plate where the arm part of the piezoelectric oscillator is situated. SOLUTION: A support part 1 and a mask plate 4 are integrally stuck to both sides in thickness direction of an H-shaped flexible vibrating piezoelectric oscillator 6 by use of an adhesive 2. The piezoelectric oscillator 6 and the mask plate 4 keep a gap G so as not to prevent the excitation of the piezoelectric oscillator 6. A through- hole 5 situated in the arm part 7 of the piezoelectric oscillator 6 is provided on the stuck mask plate 4. The same metal material as the exciting electrode of the piezoelectric oscillator 6 is independently evaporated from Z-axial direction which is the thickness direction of the piezoelectric oscillator 6 to add a mass to the arm part 7 of the piezoelectric oscillator 6 in such a manner as to be well-balanced, whereby the vibrating attitude of the piezoelectric oscillator 6 can be corrected. Thus, an unstable factor of vibrating attitude caused by the crystalline structure of the oscillator itself, a failure in working precision, or degenerate phenomenon of vibration can be corrected. |
