| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent electrification and electrostatic destruction in a TFT (thin film transistor) in a production process of a liquid crystal panel. SOLUTION: A support part 7 of a transfer tool 6 supporting a glass substrate 2 with a TFT is made a conductive member, and the support part 7 consisting of this conductive member is grounded through the conductive transfer tool 6. When the glass substrate 3 with the TFT is transferred while from an instant when the transfer tool 6 rises, and lifts the glass substrate 3 with the TFT up to the end of the transferring, the support part 7 is in contact with the edge of the glass substrate 3 with the TFT, and static electricity caused by peeling the glass substrate 3 with the TFT from a plate 1 is set free to the ground through the conductive support member 7 and the transfer tool 6, and the electrification and electrostatic destruction in the TFT formed on the glass substrate 3 with the TFT are prevented.</p> |
