| 摘要 |
PROBLEM TO BE SOLVED: To provide an independent operation method in a semiconductor processor, which can independently operate a preprocessor by manual operation without transferring a substrate to/from the preprocessor as needed. SOLUTION: An operator gives an instruction to supply the substrate to a CVD device 11 from the input device of a main controller in a controller by manual operation. The controller receiving the instruction stops the automatic supply of the substrate from the preprocessors 1 and 5. Then, the operator opens the door 2 of the substrate carry-in robot T1 and loads the substrate on the substrate carry-in robot T1. Then, the operator closes the door 2 of the substrate carry-in robot T1 and depresses an operation start switch 1. Thus, the substrate loaded on the substrate carry-in robot T1 is transported to the CVD device L1. |
