PROJECTING ALIGNER,申请号JP19960301089-传众专利搜索

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发明名称	PROJECTING ALIGNER
摘要
申请公布号	JPH10133105(A)	申请公布日期	1998.05.22
申请号	JP19960301089	申请日期	1996.10.25
申请人	NIKON CORP	发明人	ISHIYAMA SATOSHI
分类号	G02B13/24;G03F7/20;H01L21/027;(IPC1-7):G02B13/24	主分类号	G02B13/24
代理机构		代理人
主权项
地址

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