发明名称 DEVICE FOR CREATING A THREE-DIMENSIONAL SELF-MAINTAINED DISCHARGE
摘要 <p>The invention concerns quantic electronics, and can be used for the pumping of periodic pulse lasers such as CO2, N2, HF, and eximer lasers. It can also be used to resolve chemical plasma problems. The device ensures the formation of a stable, volumetric, self-maintained discharge in the presence of considerably non-homogeneous gaseous media while increasing the volume and energy of the volumetric self-maintained discharge inside discharge chambers having a simple, reliable structure. The invention essentially comprises forming all the electrodes (2, 3) of a laser chamber (1) from different, unconnected and parallel electrical plates (7). Each of these plates is connected by means of its stabilising element (10) to a common bus (6) of a section (9) of the pumping source (5) which is separate and not electrically connected to other ones. In addition, each of the electrode (2, 3) plates (7) can be connected by means of its stabilising inductance (12) to a high-voltage pre-pulse source (11). Using the elements (17) which are made of a dielectric material and placed between the plates (7) of all the electrodes, a flow of gaseous medium is formed, with a directional speed perpendicular to the working edges (19) of the electrode (2, 3) plates (7).</p>
申请公布号 WO1998021789(A1) 申请公布日期 1998.05.22
申请号 RU1997000356 申请日期 1997.11.12
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