| 摘要 |
<p>In order to increase the rate of scanning in probe scanning apparatus for a probe microscope, by increasing a resonant frequency of the apparatus, a cantilever 41 is connected to an edge of a spindle 8 receiving a force in the z-axial direction from a first poise coil motor, and a probe 45 is attached to the free end of the cantilever 41. The spindle 8 is supported by an internal tube 13 with a spring 11. The movement of the spindle 8 is enlarged by the spring cantilever 41 to be conveyed to the probe 45, whereby displacement of the probe 45 is amplified. For this reason, a resonance frequency f0 of a system comprising the movable element of the first poise coil motor, spindle 8, spring 11, spring cantilever 41 and probe 45 can be increased. The cantilever spring 41 may be changed to cantilevers in two or more stages and, a resonance frequency f0 of the system can be increased with comparatively compact configuration. <IMAGE></p> |
