Sensor arrangement for measuring mass of flowing medium using principle of heated film anemometer

摘要

The arrangement has a carrier substrate (T) parallel to the flow direction to form inflow and outflow sides and with film resistance layers (Ro,Ru) on its upper and lower sides. Each film resistance layer consists of two spatially separate resistance tracks perpendicular to the flow direction (S) so that one tracks is on the inflow side and one on the outflow side. Each inflow track is electrically separate from the corresp. outflow track. The resistance tracks on the inflow side and the tracks on the outflow side are connected to form at least two separate measurement bridges corresp. to separate constant flow controllers.