发明名称 |
METHOD OF FORMING SURFACE ALLOYS |
摘要 |
FIELD: surface treatment technology. SUBSTANCE: invention relates to modifying surface layers of materials, in particular, to forming surface alloys by agency of concentrated energy fluxes. Method consists in evaporating target by means of pulse energy flux that simultaneously affects substrate on which alloy is formed. Target is placed between pulse energy flux source and substrate. As energy flux, pulse electron beam is used transferred in guiding magnetic field with maximum electron energy 10 to 100 keV and current intensity exceeding Pearce current in the region between target and substrate. EFFECT: intensified procedure. 3 dwg
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申请公布号 |
RU2111281(C1) |
申请公布日期 |
1998.05.20 |
申请号 |
RU19970100471 |
申请日期 |
1997.01.10 |
申请人 |
INSTITUT SIL'NOTOCHNOJ EHLEKTRONIKI SO RAN |
发明人 |
NAZAROV D.S.;OZUR G.E.;PROSKUROVSKIJ D.I.;ROTSHTEJN V.P.;SHULOV V.A.;NAZAROV D.S.;OZUR G.E.;PROSKUROVSKIJ D.I.;ROTSHTEJN V.P.;SHULOV V.A. |
分类号 |
C23C14/30;C23C14/48;(IPC1-7):C23C14/30 |
主分类号 |
C23C14/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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