发明名称 METHOD OF FORMING SURFACE ALLOYS
摘要 FIELD: surface treatment technology. SUBSTANCE: invention relates to modifying surface layers of materials, in particular, to forming surface alloys by agency of concentrated energy fluxes. Method consists in evaporating target by means of pulse energy flux that simultaneously affects substrate on which alloy is formed. Target is placed between pulse energy flux source and substrate. As energy flux, pulse electron beam is used transferred in guiding magnetic field with maximum electron energy 10 to 100 keV and current intensity exceeding Pearce current in the region between target and substrate. EFFECT: intensified procedure. 3 dwg
申请公布号 RU2111281(C1) 申请公布日期 1998.05.20
申请号 RU19970100471 申请日期 1997.01.10
申请人 INSTITUT SIL'NOTOCHNOJ EHLEKTRONIKI SO RAN 发明人 NAZAROV D.S.;OZUR G.E.;PROSKUROVSKIJ D.I.;ROTSHTEJN V.P.;SHULOV V.A.;NAZAROV D.S.;OZUR G.E.;PROSKUROVSKIJ D.I.;ROTSHTEJN V.P.;SHULOV V.A.
分类号 C23C14/30;C23C14/48;(IPC1-7):C23C14/30 主分类号 C23C14/30
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