发明名称 |
Pyrolytic boron nitride container and manufacture thereof |
摘要 |
<p>There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm<-1> to 6500 cm<-1> has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film. <IMAGE></p> |
申请公布号 |
EP0842913(A1) |
申请公布日期 |
1998.05.20 |
申请号 |
EP19970120181 |
申请日期 |
1997.11.18 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KIMURA, NOBORU;KUSHIHASHI, TAKUMA;YAMAGUCHI, KAZUHIRO;SATOH, AKIRA |
分类号 |
C04B35/583;C23C14/24;C23C16/34;C30B23/06;(IPC1-7):C04B35/583;C23C16/00 |
主分类号 |
C04B35/583 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|